ISSN 2348 – 7968 Characterization of Thin Film Nickel …
RF sputtering. Devices using RF sputtering system shown in Figure 2. The radio frequency that is often used in industries, fields of scientific research and the field is 13.56 MHz [8]. RF-sputtering has many advantages compared to DC-sputtering because in addition to insulating material, the system can also use the target type of
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